Introduction
Micro and nanotechnology are characterized by ultrathin functional
elements, high structural complexity, great diversity of materials
and sophisticated technological process. In comparison with
other industrial procedures and development, semiconductor technology
that is moving towards to subnanolandscape makes particularly
high demands in advanced diagnostiics. Materials analysis techniques
probe and characterize the surface, sub-surface and bulk to
answer the questions: What is present, how much and its lateral
and depth features? What is its relationship to my current issues.
Many different methods of analysis are required to characterize
materials, processes, process agents and ultimately complete
components, microsystems and products. These methods may range
from simple physical and chemical techniques, such as optical
microscopy and wet chemical analysis , to very sophisticated
methods of analysis using electron and ion beams. These traditional
and advanced diagnostic tools are needed on continual basis
not only in research and development but also for quality control,
reliability assurance, yield improvent, physical debugging and
system failure analysis.
Background
Having a well-equipped analytical laboratory on –site
and readily available to Singapore’s cutting-edge electronic
product manufacturing and R&D has many advantages. Keeping
this in mind, this inevitable infrastructure conceptualized
and evolved at Institute of Microelectronics currently has grown
nearly 700times in industry relevancy signature through high
net worth multinational and local companies since 1991. Equipment
alone are not enough, expertise and experience are also essential.
Well-educated and knowledgeable scientists and engineers with
years of industrial experience in the analytical technologies,
failure analysis and reliability, material and process characterization
from different corners of the world have been recruited to build
up this facility. As materials systems and device structures
become more complex and smaller, the number of challenges that
will require this type of advanced diagnostics at shortest turnaround
time will be increasing and we are addressing and growing with
consensus of high-tech industries.
Enclosed are the details such as infrastructure, brief fundamentals,
applications, capabilities and mode of collaborations.
• Infrastructure
• Focused
Ion Beam (FIB)
• Transmission
Electron Microscope (TEM)
• Auger
Electron Spectroscopy
• Secondary
Ion Mass Spectroscopy (SIMS)
• M-STEM
• Electrical Testing (i.e.ESD,
Latchup, etc) and many more
For business or technical enquiries, please contact us via
e-mail: analytical_services@ime.a-star.edu.sg
